MVD300 / MVD300E
The MVD300® (and MVD300E with an EFEM) are designed for high performance, flexibility and reliability for the most demanding high volume manufacturing applications.
Features and Benefits
- Batch processing for high throughput and small footprint
- 200mm wafers (Pod loader or EFEM available)
- 300mm wafers (EFEM enabled)
- Singulated die on tape frames
- Components on trays
- Custom substrate fixturing available
- Superior Cost of Ownership – low consumption and efficient utilization of precursors
- Up to 4 Precursors
- Integrated plasma surface treatment and chamber clean capability
- Automated process sequence routines
- Extensive self-diagnostic and data logging capability
- Exceptional reliability
- MVD and ALD-capable