APCVD
根据与 SPP Technologies, Ltd. 签订的协议,SPTS 为基于 SiH4 或 TEOS 的电介质的常压 CVD 提供解决方案。这些 APCVD...
根据与SPP技术有限公司的协议,SPTS为基于SiH4或TEOS介质薄膜的常压CVD提供解决方案。这些 APCVD 产品系列基于拥有专利的 Watkins Johnson (WJ) 线性喷射技术,能够准确、可重复地沉积有掺杂或无掺杂薄膜,整片晶圆没有瞬态薄膜特性,且整片晶圆填孔均匀。
晶圆传送通过自清洁式皮带输送机完成,对于电介质间隙填孔,可实现卓越的系统可靠性和最低的 CoO。
晶圆传送通过自清洁式皮带输送机完成,对于电介质间隙填孔,可实现卓越的系统可靠性和最低的 CoO。
经工厂认证的翻新改造服务适用于所有设备,多种升级改造选项确保设备寿命与可扩展性
The link you have selected is located on another server. Neither SPTS Ltd. nor any of its subsidiaries endorses this web site, its sponsor, or any of the information, policies, activities, products, or services offered on the site or by any advertiser on the site. By clicking on the OK button below, you agree and acknowledge the foregoing and will be directed to the selected site.