MVD®

分子气相沉积 (MVD®) 系统

MVD®用高度可重复的气相沉积替代方案取代传统的液体涂层工艺，是制造应用的理想选择。

受益于MVD®疏水性防粘连薄膜的典型MEMS设备包括显示屏、传感器、执行器、RF开关、喷墨打印和数据存储设备。生物MEMS的应用包括微流体学（芯片实验室、微板块）中的润湿控制、植入式装置的钝化、需要生物相容性的表面涂层以及需要功能化表面涂层的器件。

MVD®也用于需要防潮层、防腐涂层或用于印刷释放层的

MVD100E

MVD100E

The MVD100E is SPTS's designated tool for R&D or pilot manufacturing. MVD® is finding increasing use in applications requiring moisture...

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MVD300 / MVD300E

MVD300 / MVD300E

The MVD300® (and MVD300E with an EFEM) are designed for high performance, flexibility and reliability for the most demanding high volume...

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MVD4500

MVD4500

The MVD4500 is our panel and large substrate tool. It is capable of handling multiple substrates with sizes up to 930 x 720 mm. It is the only...

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