PECVD

等离子体增强化学气相沉积（PECVD）是一种利用等离子体中的能量在晶圆表面引发反应的过程，而这些反应在传统的CVD中需要更高的温度。沉积过程中的高能离子轰击也能改善薄膜的电学和机械性能。

Delta 沉积系统

SPTS的Delta-PECVD系统广泛应用于MEMS、化合物半导体和先进封装领域，特别是在需要低工艺温度的应用中

Osprey® PECVD

Osprey® PECVD

PECVD for Advanced Packaging For advanced packaging applications, SPTS' Osprey PECVD system...

阅读更多
Delta® 沉积系统

Delta® 沉积系统

阅读更多

Categories

Inquiry about: PECVD

Please provide your name
Please provide your name
Please provide your email address
Please provide your telephone number
Please provide your job title
Please provide your company name
Please enter your message
Please confirm that you have read and agree to the privacy policy

Privacy Policy

×

You are now leaving the SPTS website

The link you have selected is located on another server. Neither SPTS Ltd. nor any of its subsidiaries endorses this web site, its sponsor, or any of the information, policies, activities, products, or services offered on the site or by any advertiser on the site. By clicking on the OK button below, you agree and acknowledge the foregoing and will be directed to the selected site.