SPTS's fxP® Wafer Handling Platform
The fxP® is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.
Available as a 4 – 8” system with vacuum cassettes that are compatible with SMIF robots or as an 8 – 12” system with an integrated EFEM.
The fxP platform is compatible with all SPTS's process modules, including Monarch 25 and Monarch 300 HF etch modules, and CVE XeF2 etch modules.
- Omega® fxP - a cluster system supporting up to 6 plasma etch (ICP, DRIE, and/or Synapse) chambers
- Mosaic™ fxP - a cluster system supporting up to 6 plasma dicing chambers
- Primaxx® fxP - a cluster system supporting up to 6 Monarch 25 or Monarch 300 vapor HF etch chambers
- Xactix® fxP - a cluster system supporting up to 6 CVE XeF2 etch chambers
- Sigma® fxP - a cluster system supporting up to 6 PVD chambers (including associated pre-clean/degas module options)
- Delta™ fxP - a cluster system supporting up to 6 PECVD chambers
- Versalis fxP® - a cluster system supporting a mixture of etch and deposition process chambers (up to 6 modules in total), useful for R&D or pilot production, saving both capital expenditure and cleanroom footprint.