Delta® 沉积系统 Delta® 沉积系统

Delta® 沉积系统

SPTS的Delta-PECVD系统广泛应用于MEMS、化合物半导体和先进封装领域，特别是在需要低工艺温度的应用中。

主要优势：

  • 晶圆尺寸从75mm到300mm
  • 径向对称气流，实现了卓越的片内（WIW）均匀性
  • 多达10条气体管路和可选的主板控制液体输送系统
  • 用于应力调整的混频等离子体能力
  • 用于关键低温[<175°C]封装应用的动态加热盘冷却
  • 单片和多片式预加热腔体可选，用于对敏感衬底进行除气处理

PECVD 服务的市场：

Categories

Inquiry about: Delta® 沉积系统

Please provide your name
Please provide your name
Please provide your email address
Please provide your telephone number
Please provide your job title
Please provide your company name
Please enter your message
Please confirm that you have read and agree to the privacy policy

Privacy Policy

×

You are now leaving the SPTS website

The link you have selected is located on another server. Neither SPTS Ltd. nor any of its subsidiaries endorses this web site, its sponsor, or any of the information, policies, activities, products, or services offered on the site or by any advertiser on the site. By clicking on the OK button below, you agree and acknowledge the foregoing and will be directed to the selected site.