uEtch
SPTS's uEtch is a single-wafer system specifically designed for university and small research laboratories.
Key Benefits
- Fully integrated, compact system includes built-in HF gas cabinet
- PLC controlled with multi-user features and extensive safety interlocks
- Can process single whole wafers (100-200mm) or die on a carrier
- HF vapor processes are transferable to SPTS 3- and 25-wafer production systems, offering a path from concept to production