Metal Deposition

The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through to MOCVD

Standard PVD – conventional sputter modules for low topography features
Advanced Hi-Fill (AHF) PVD – ionized sputter source for deposition into high aspect ratio features

The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through...

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