Tech Insights
These articles cover a range of semiconductor and microelectronics device manufacturing technologies and industry trends. They focus on applications where SPTS's technologies and solutions are used as well as highlight the unique advantages that our processes offer customers in these areas:
MEMS
- 1000th DRIE module installed - highlighting SPTS leadership in deep silicon etch
- AlN and its Uses in the Electronics Industry (Part I)
- Claritas End-point for DRIE
- Cost-Effective LPCVD for Low Stress SiN for MEMS
- Etch and Deposition Processes for BioMEMS
- Introduction to HF Release Etch for MEMS
- Introduction to Si DRIE
- Low Temperature PECVD for MEMS
- MEMS for Mobile Applications
- MEMS Microphones
- Morflex - Flexible Process Control for MEMS and TSV Etch
- MVD Anti-Stiction Coatings for MEMS
- Plasma Dicing
- Plasma Dicing Integration Options
- Plasma Etch End-Point Control
- Plasma Processes for VCSELs
- Surface Smoothing Processes for High Performance AlN Piezoelectrics
- Wafer Level Packaging of MEMS
- Xenon Difluoride - Dry Vapor Etch for Releasing MEMS
Advanced Packaging
- Blanket Silicon Etch
- Etch and Deposition Solutions for 2.5D/3D Packaging
- Fan-Out WLP
- High Productivity PVD for UBM/RDL
- Introduction to Si DRIE
- Via Reveal Passivation
- Via Reveal Processing
- Plasma Dicing
- Plasma Dicing Integration Options
- Plasma Etch End-Point Control
- Wafer Level Packaging of MEMS
- Morflex - Flexible Process Control for MEMS and TSV Etch
Power Device Manufacturing
- Backside Metallization for Power Devices
- Next Generation 300mm PVD for Power Devices Manufacturing
- Introduction to Si DRIE
- Plasma Etch End-Point Control
- Plasma Etch Processes for SiC and GaN-on-Si Power Devices
- PVD Processes for SiC Power Devices
RF-IC Manufacturing
- AlN and its Uses in the Electronics Industry (Part I)
- Plasma Etch End-Point Control
- Plasma Etch Processes for WBG RF Devices
- PECVD Processes for Compound Semiconductor Devices
- Surface Smoothing Processes for High Performance AlN Piezoelectrics
- Synapse for AlN/AlScN Etch for BAW Filters