Sigma® 沈積系統

Sigma 產品系列採用涵蓋傳統 PVD 至 MOCVD 等的各種沉積技術，支援從 100mm 至 300mm 的晶圓尺寸 

金屬沈積技術

  • 標準 PVD – 適用於低表層結構特徵的傳統濺鍍膜組
  • 高階 Hi-Fill (AHF) PVD – 適用於沉積至高深寬比特徵的離子濺鍍來源

PVD 服務的市場

Sigma® 沈積系統

Sigma® 沈積系統

Sigma 產品系列採用涵蓋傳統 PVD 至 MOCVD 等的各種沉積技術，支援從 100mm 至 300mm...

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