SPTS 供應的半導體晶圓加工系統適用於量產、研發及試驗生產環境,而且可以在許多晶圓處理平台上使用。所服務的市場包含先進封裝、MEMS、LED、功率半導體和高速 RF-IC。
SPTS 的 ICP、DRIE、PECVD、PVD 及 MOCVD 模組適用於 3 種晶圓處理平台:
The link you have selected is located on another server. Neither SPTS Ltd. nor any of its subsidiaries endorses this web site, its sponsor, or any of the information, policies, activities, products, or services offered on the site or by any advertiser on the site. By clicking on the OK button below, you agree and acknowledge the foregoing and will be directed to the selected site.