imec - Deep Oxide Etch for Hyperspectral Imaging Filters
Case study showing how SPTS's Synapse etch module enabled the successful manufacturing of SiO2-metal oxide filter stacks, for use in hyperspectral imaging cameras
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Teledyne Micralyne - Enhanced Remote Customer Support
During COVID-19, SPTS implemented a remote support solution to enable the commissioning of a new etch system at Teledyne Micralyne when SPTS engineers could not be on-site.
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SK Hynix - Via Reveal for High Bandwidth Memory
SPTS worked with SK Hynix to increase productivity of their backside via reveal process used in high bandwidth memory chip manufacturing - Optimizing production yield and reducing cost of ownership
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imec - Silicon Etch for Neural Probes
Download this Case Study illustrating how SPTS's Si DRIE technology is used by imec for manufacturing neural probes for mapping brain activity.
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University of Swansea - "Plasma Etch for Silicon Microneedles"
Illustrates the results of a joint development project between SPTS and University of Swansea to create a process for volume production of silicon microneedles for biomedical applications.
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imec - "Blanket Silicon Etch for Lower Cost TSV"
Discusses the introduction of blanket silicon etching to replace CMP, as part of a joint development project with imec to optimize a manufacturable "TSV-last" route for a multi-wafer stack.
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Skyworks - "Improving MTBC for SiN Etch"
Describes how SPTS worked with Skyworks to significantly improve Mean Time Before Clean (MTBC) for a SiN etch step, used in the manufacturing of their GaAs RF devices.
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