SPTS offers PECVD dielectric films for both active and passive photonics devices. PECVD dielectrics are used as anti-reflective coatings, isolation and passivation layers for VCSELs and LEDs, and as stress compensation layers in a variety of photonic applications.
Doped and undoped silica and amorphous silicon films are used for planar waveguides while low loss PECVD SiON is used for multilayer reflector stacks.
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