Sigma® deposition systems
The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through...
Sigma 产品系列支持 100mm 至 300mm 的晶圆尺寸,沉积技术覆盖了传统 的PVD 到 MOCVD 工艺。
The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through...
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