MEMS
微機電系統 (Micro Electro Mechanical Systems, MEMS) 是用於不斷增加的消費類、汽車類和工業類產品的微設備，例如智慧型手機、麥克風、安全氣囊感應器、陀螺儀、導航系統、遊戲機和生物醫學設備。
MEMS 設備的製造涵蓋了各種應用與材料，而其中預定的制程經常被用來製造提升生活品質的設備。
您知道自己每天使用 MEMS 裝置的頻率有多高嗎？按一下縮略圖以檢視此資訊圖表。
SPTS 是為 MEMS 產業供應晶圓加工系統的領導廠商。
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